Process Monitoring and Process Control

由 H Zhang 著作 · 2022 · 被引用 14 次 — In this study, a process control monitor (PCM) structure compatible with the device manufacturing process is designed to achieve accurate determination of the ...

由 LR Snowden 著作 · 1995 · 被引用 2 次 — Process Control Monitor (PCM) to device modeling is used as an aid in selecting wafers for testing to meet high throughput demands.

In the application of integrated circuits, process control monitoring (PCM) is the procedure followed to obtain detailed information about the process used.

The Process Monitoring and Control System allows you to continuously monitor and regulate your process variables, as well as track and record multiple data ...

由 M Berry 著作 · 2017 · 被引用 4 次 — This chapter provides a general background on how process monitoring and control technologies and strategies are applied to two major plastics processes: ...

由 U Sobe 著作 · 被引用 5 次 — Process control monitor (PCM) test structures are part of the SPC (statistical process control). They are used to char- acterize and to control the ...

Wafer Acceptance Testing (WAT) also known as Process Control Monitoring (PCM) data is data generated by the Fab at the end of manufacturing and generally ...